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KLA, leading provider of precision microstructure and surface measurement systems, is a $6.9B company and has invested $2.9B in R&D in the last 4 years. With more than 59,900 instruments installed worldwide, KLA dominates the electronics industry.

The KLA Instruments comprehensive portfolio of products, software, analysis, services and expertise is designed to help scientists, researchers and engineers address their toughest measurement challenges by generating reliable, precise data. Through use of these products and services, they are better able to deliver the breakthroughs that impact their respective fields.

NanoTechnology Solutions is the exclusive distributor of KLA Instruments and supplies, installs, supports surface metrology products and accessories across Australia and New Zealand. Contact us to discuss your specific requirements and applications.

Stylus Profilers

KLA Tencor-P-7 Stylus Profiler KLA Tencor-P-7 Stylus ProfilerKLA Instruments Alpha-Step stylus profilometers, Tencor P-series stylus profilometers and HRP-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.

 

Since the launch of the Alpha-Step 100 stylus profilometer in 1977, KLA’s technical experts have continued to bring key innovations such as advanced topography sensors, ultra-flat scanning stages and fully automated measurement capability to market. KLA’s tools continue to evolve, providing repeatable and accurate measurements for your surface metrology requirements. Learn more about the rich history of innovation of KLA stylus profilers.

 

KLA P-series Stylus Profilers have been chosen by leading Australian Universities, CSIRO and Defence Science & Technology Group. The unmatched performance of P-7 Stylus Profiler is achieved by revolutionary UltraLite® sensor which delivers ultra-high resolution of 0.01Å. The UltraLite® sensor is a linear variable differential capacitive (LVDC) sensor with the lowest mass, lowest noise, and highest resolution of any sensor available today. It is the only sensor technology with constant force control over the entire vertical range. Almost 20 years ago, KLA stopped using LVDT sensors even on its entry level stylus profilers due to many limitations of LVDT. The large optical flat stage, decoupled lead screws and special stage driving system deliver the most accurate single scans of 156mm length without stitching. The P-7 is incredibly easy to use and forgiving to some of usual operator errors.

Optical Profilers

The KLA Instruments portfolio of optical profiler tools are widely used in the industry due to their rapid measurement time and ability to provide 3D topography across many surface types. One of the more challenging measurements for a traditional optical profiler is the measurement of multi-dimensional, multi-material surfaces that provide varying levels of reflectivity. When a single sample contains both very low reflectivity surfaces and high reflectivity surfaces, measurement becomes a challenge as a much smaller amount of light reaches the optical sensor from a lower reflectivity surface than it does for a higher reflectivity surface. Similarly, very rough, or very sloped surfaces also limit the amount of reflected light reaching the optical sensor making simultaneous measurement of these surfaces difficult.

Nanotechnology Solutions KLA Zeta Optical Profiler

Zeta-20 Multi-Mode Optical Profiler

The Zeta-20 benchtop optical profiler is a non-contact, 3D microscope and surface topography measurement system. The 3D optical profiling system is powered by patented ZDot technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.

 

The Zeta-20 3D optical profiling system integrates six different optical metrology technologies in one configurable and easy-to-use system. ZDot measurement mode simultaneously collects a high-resolution 3D scan and a True Color infinite focus image. Other 3D measurement techniques include white light interferometry, phase shifting interferometry, Nomarski interference contrast microscopy, and shearing interferometry. Film thickness can be measured with ZDot or an integrated broadband reflectometer. The Zeta-20 is also a high-end microscope that can be used for sample review or automated defect inspection. The Zeta-20 3D optical profiling microscope supports both R&D and production environments by providing comprehensive step height, roughness, and film thickness measurements, and defect inspection capability.

Nanotechnology Solutions KLA Instruments profilm3d optical profiler

ProFilm3D White Light Interferometer

The newest generation of the Filmetrics ProFilm3D optical profiler is designed to specifically address the challenges where larger variations in surface topography and reflectivity require resolution of fine detail. The ProFilm3D is uniquely suited for applications like these because the combination of new optical techniques enables measurement with a single tool requiring no change in setup. In this feature, we highlight the applications and benefits of two such optical techniques available on the new ProFilm3D – the Enhanced Roughness Mode and TotalFocus™ Imaging.

 

A drawback to using traditional White Light Interferometry (WLI) for measurement of rough surfaces is a low fringe contrast leading to a low signal-to-noise ratio. Phase Shifting Interferometry (PSI), another technique traditionally used to measure rough surfaces, has a maximum vertical range of measurement that may be insufficient to measure enhanced roughness on a surface.

 

The new Enhanced Roughness Mode on the ProFilm3D addresses both these challenges by providing a high fringe contrast needed for improved fidelity on sloped surfaces and a greater than 70 percent signal improvement on rough surfaces.