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KLA is a $6.9B company and has invested $2.9B in R&D in the last 4 years. Nanomechanical testers from KLA Instruments provide precise, reliable and repeatable measurements of hardness, Young’s modulus, and other mechanical properties to help you explore new materials, reduce product failures and accelerate your time-to-market. We offer nanoindentation testing tools that range from easy-to-use to a high performance nanoindenter tester to the industry’s highest performance and most versatile nano tensile tester.

NanoTechnology Solutions is the exclusive distributor of KLA Instruments and supplies, installs, supports nanoindenter products and accessories across Australia and New Zealand. Contact us to discuss your specific requirements and applications.

The field of nanoindentation was co-founded by KLA’s Dr. Warren Oliver almost 40 years ago, and KLA Instruments has continued to foster a culture of innovation. From releasing the first nanoindenter in the market to expanding nanoindentation technology into fast, high-temperature and high strain rate testing, KLA have continued to develop new static and dynamic measurement types, driving forward the next generation of nanomechanical testing of material hardness.

Learn more about the rich history of innovation of KLA Nanoindenters.

NanoFlip Nanoindenter in hand

The NanoMechanics InSEM Microprobe is a high-performance tool designed to function in an in-situ environment to characterise the mechanical properties of surfaces. It has a sub-nanometer resolution. The InSEM is designed to characterise the mechanical properties of the surface of samples in an in-situ vacuum environment such as SEM or FIB at sub-nanometre level. The modular, high performance and flexible design of InSEM enables it to mount on a variety of ports and even directly on SEM stage.
InSEM nanoindentation system on FEI SEM


These InSEM systems combine InForce 50, InQuest Controller and InView Software for in-situ characterisation of mechanical properties of surfaces. These systems can be mounted on the wall of SEM/FIB chamber. Minimum space is occupied within the chamber and the system can be easily drawn back to make space for other SEM/FIB testing modes.


In the InSEM III system, a stage-mounted cradle and micro-positioners are used to position a sample in proportion to the InForce actuator. The InSEM III is ideal when on-chamber configuration is limiting. It is designed to maximise frame stiffness while optimizing positioning resolution.


The InSEM HT combines the precision and dynamic range of in-situ mechanical testing and multi-location thermocouple feedback and active cooling with independent temperature control of tip and sample. With this system 800°C isothermal heating of sample and tip can be achieved.

The NanoFlip nanoindenter is the most versatile instrument capable of mechanical testing in both in-situ environments such as SEM, FIB, vacuum chamber etc and ex-situ environments such as AFM, Optical Microscope and Optical Profilometer. NanoFlip works best with RAMAN, XRD, DIC, SEM, FIB, AFM, Optical Microscope and Optical Profilometer. NanoTechnology Solutions is the exclusive distributor for these nanoindenter products in Australia and New Zealand.

NanoFlip Nanoindenter
NanoFlip Nanoindenter Horizontal

NanoFlip uses InView software that provides an exceptional control over the experiment. This software allows complex tasks to run in the background to enable easy learning for new users. This is still usable for advanced users as complex controls are accessible when needed. The InView software also generates presentation-ready data plots immediately that can be viewed on different computers in several locations.


NanoFlip includes InQuest Controller run by an all-in-one computer. This Controller provides quasi-static and dynamic control enabling precise measurement of displacements over a wide range from 0.05 nm to 50 µm. NanopFlip enables the tilting of stage to vertical position in order to put the sample perfectly in line to FIB it to ideal dimensions. Post-FIB, the sample can be rotated by 90° aligning it to the indenter. This automatic and seamless one-step transition from FIB to Nanoindentation allows for quick and accurate testing.

NanoFlip incorporates nano-mechanical actuators in a dynamic mode. This allows measurement of contact stiffness and continuous dynamic analysis of viscoelastic properties such storage and loss module. The InForce 50 actuators deliver best-in-class dynamic range by incorporating voice-coil force generation and capacitive displacement resolution. A 50 mN of force allows compression, membrane and indentation testing with ease and accuracy. The actuator is force-controlled, making it the most accurate and precise actuator available. Low noise, stability and closed-loop control features available while operating in quasi-static or dynamic modes. The electromagnetic nature of actuator and its linear physics of force actuation design enables separation of measurement variables such as force and displacement. InForce 50 is the only actuator that can perform in vacuum and accomplish testing up to 500 Hz.

The Gemini System is the world’s first instrument that provides isometric and multi-dimensional force for accurate measurement and study of hardness, wear, adhesion and dynamics of tribology during mechanical testing. This one of its kind commercial tool can measure forces and displacements in quasi-static and dynamic modes at sub-nm and nN resolutions. The isometric axes of Gemini’s system enable both the normal and the lateral axes deliver the resolution, force range and dynamic performance with highest accuracy.

This system can study contact mechanics in multiple directions and measure the interaction between two objects sliding (not just making a contact) across each other. Applications of Gemini system include study of adhesion, MEMS, nanofretting, topography, scratch resistance, modulus, poisson’s ratio, anisotropy, damping, lubrication, ultra-thin film, stick slip-sliding and single asperity characterisation.


Multi-dimensional dynamic performance120 Hz resonant frequency
Tension or compressionno transition
Fast time constant20 µs with sub-nanometer noise
Electromagnetic activationlow drift and dynamic accuracy
High load frame stiffness106 N/m