Test Grating TGF1:
Test grating TGF1 is intended for:
– SPM calibration in X or Y axis;
– detection of lateral and vertical scanner nonlinearity;
– lateral force calibration.
Lateral force calibration could be carried our by analysis of the contact responce, measured on the horisontal and inclined planes.
|Structure:||the grating is formed on Si wafer top surface|
|Pattern types:||1- D array of trapezoidal steps (in X or Y direction) having precise linear and angular sizes|
|Edge angle:||54,5 degrees|
|Step height:||1,75 um|
|Chip size:||5x5x0,3 mm|
|Effective area:||central square 3x3mm|