Description
Test Grating TGF1:
Test grating TGF1 is intended for:
– SPM calibration in X or Y axis;
– detection of lateral and vertical scanner nonlinearity;
– lateral force calibration.
Lateral force calibration could be carried our by analysis of the contact responce, measured on the horisontal and inclined planes.
Specifications:
| Structure: | the grating is formed on Si wafer top surface |
| Pattern types: | 1- D array of trapezoidal steps (in X or Y direction) having precise linear and angular sizes |
| Edge angle: | 54,5 degrees |
| Step height: | 1,75 um |
| Period: | 10±0,01 µm |
| Chip size: | 5x5x0,3 mm |
| Effective area: | central square 3x3mm |
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