A$ 554

Calibration grating TGQ1 is intended for simultaneous calibration in X,Y,and Z directions.

SKU: TG1 Category:


Test grating TGQ1 is intended for:
simultaneous calibration in X, Y and Z directions;
lateral calibration of SPM scanners;
detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.


Grating description
Structure– Si wafer
– the grating is formed on the layer of SiO2
Pattern types3-Dimensional array of small rectangles
Period3.0±0,05 µm
Height20nm ±1,5 nm*
Rectangles side size:1,5±0,35 µm
Chip size5x5x0,5 mm
Effective areacentral square 3×3 mm


* the average meaning based on the measurements of 5 gratings (from the batch of 300 gratings) by SPM calibrated by PTB certified grating TGZ1. Basic step height can vary from the specified one within ±10% (for example step height can be 22±1.5nm)

Additional information

Weight 0.1 kg
Dimensions 8 × 5 × 0.8 cm


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