Description
Test grating TGQ1 is intended for:
simultaneous calibration in X, Y and Z directions;
lateral calibration of SPM scanners;
detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.
| Grating description | |
| Structure | – Si wafer – the grating is formed on the layer of SiO2 |
| Pattern types | 3-Dimensional array of small rectangles |
| Period | 3.0±0,05 µm |
| Height | 20nm ±1,5 nm* |
| Rectangles side size: | 1,5±0,35 µm |
| Chip size | 5x5x0,5 mm |
| Effective area | central square 3×3 mm |
* the average meaning based on the measurements of 5 gratings (from the batch of 300 gratings) by SPM calibrated by PTB certified grating TGZ1. Basic step height can vary from the specified one within ±10% (for example step height can be 22±1.5nm)
Reviews
There are no reviews yet.