A$ 370

Grating set for Z-axis SPM calibration with three different height range – 20nm, 110nm, 520nm

SKU: CG7 Category:


Grating set TGS1
Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 3 gratings TGZ1, TGZ2, TGZ3 with different step heights.

Grating description
Structure:– Si wafer
– the grating is formed on the layer of SiO2
Pattern types:1- Dimensional (in Z-axis direction)
Step height:TGZ1 – 20,0±1.5 nm*
TGZ2 – 110±2 nm*
TGZ3 – 520±3 nm*
Period:3±0,1 µm
Chip size:5x5x0,5 mm
Effective area:central square 3×3 mm


* – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)

Additional information

Weight 0.1 kg
Dimensions 8 × 5 × 0.8 cm


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