Grating set TGS2 consists of 6 calibration gratings – TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1.
Grating set TGS2 can be used for:
- lateral and vertical calibration;
- detection of lateral non-linearity;
- detection of hysteresis, creep, and cross-coupling effects;
- detection of angular distortion;
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.