Test grating TGX1 is intended for:
- ￼ lateral calibration of SPM scanners;
- detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
- determination of the tip aspect ratio.
|Structure||the grating is formed on Si wafer top surface|
|Pattern types||chessboard-like array of square pillars with sharp undercut edges|
|Edge curvature radius||less than 10nm|
|Effective area||central square 3x3mm|
* – the dimensions marked * are given for information only.