TGX1

A$ 370

Test grating TGX1 is intended for lateral calibration of SPM scanners, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip aspect ratio

SKU: CG5 Category:

Description

Test grating TGX1 is intended for:

  •  lateral calibration of SPM scanners;
  • detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
  • determination of the tip aspect ratio.
Grating description
Structurethe grating is formed on Si wafer top surface
Pattern typeschessboard-like array of square pillars with sharp undercut edges
Period3±0,05µm
Edge curvature radiusless than 10nm
Chip size5x5x0,5mm
Effective areacentral square 3x3mm
Height0,6µm*

 

* – the dimensions marked * are given for information only.

Additional information

Weight 0.1 kg
Dimensions 8 × 5 × 0.8 cm

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