A$ 160

Calibration grating TGZ for SPM Z-axis calibration

SKU: TG3 Category:


Calibration grating TGZ1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.

Grating description
Structure:– Si wafer
– the grating is formed on the layer of SiO2
Pattern types:1- Dimensional (in Z-axis direction)
Step height:TGZ1 – 20,0±1.5 nm*, TGZ2 – 110±2 nm*, TGZ3 – 520±3 nm*
Period:3±0,05 µm
Chip size:5x5x0,5 mm
Effective area:central square 3×3 mm


* – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)

Additional information

Weight N/A
Dimensions N/A


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