Calibration grating TGZ1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
|Structure:||– Si wafer|
– the grating is formed on the layer of SiO2
|Pattern types:||1- Dimensional (in Z-axis direction)|
|Step height:||TGZ1 – 20,0±1.5 nm*, TGZ2 – 110±2 nm*, TGZ3 – 520±3 nm*|
|Chip size:||5x5x0,5 mm|
|Effective area:||central square 3×3 mm|
* – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)