Description
Calibration grating TGZ1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
| Grating description | |
| Structure: | – Si wafer – the grating is formed on the layer of SiO2 |
| Pattern types: | 1- Dimensional (in Z-axis direction) |
| Step height: | TGZ1 – 20,0±1.5 nm*, TGZ2 – 110±2 nm*, TGZ3 – 520±3 nm* |
| Period: | 3±0,05 µm |
| Chip size: | 5x5x0,5 mm |
| Effective area: | central square 3×3 mm |
* – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)
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