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Bruker XTrace 2 X-ray source for micro-XRF on SEM
Photos: Bruker

QUANTAX Micro-XRF

Micro-XRF for your SEM with Bruker's XTrace 2 X-ray source: trace elements down to 10 ppm, thin films from 1 nm and fast large-area mapping, alongside EDS.

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Key features

Trace elements
Detection at low ppm levels, an extended X-ray energy range and information from greater sample depth than EDS.
Small-spot mapping
Elemental maps with small spot sizes from a micro-focusing X-ray optic.
Thin films and multilayers
Analysis that electron-beam excitation cannot do.
Combined with EDS
Electron-beam and X-ray spectra collected by the same EDS detector.
Little sample preparation
No carbon coating or conductive surface needed, and often little or no polishing.
XTrace 2 source
Six selectable primary filters, Aperture Management System for topographic samples, FlexiSpot variable spot sizes, motorised retraction, saved positions, automatic tube warm-up and a safety interlock linked to the SEM load lock.
Rapid Stage (option)
Modular piezo stage for high-speed on-the-fly mapping of large areas.

Specifications

From Bruker's product page.

Analysis
Detection limit 10 ppm
Thin films From 1 nm
Layer thickness 40 µm
X-ray energy range Up to 40 keV
XTrace 2 X-ray source
Tube voltage 50 kV
Beam current 1000 µA
Primary filters 6
Spot size Down to 10 µm
FlexiSpot 10 µm and 35 µm small spots; 50–500 µm larger spots
Rapid Stage (option)
Speed Up to 10 mm/s
Mapping area 50 × 50 mm or larger

Resources

Webinars and videos

From the manufacturer's own channels.

Applications