DVIA-P Active Pneumatic Isolation
DAEIL DVIA-P: active pneumatic isolation for semiconductor metrology and inspection tools, up to 20,000 kg, with stage feedforward and SEMI host connectivity.
Key features
- Heavy tools
- CD-SEM, DR-SEM, photomask repair, reticle inspection, e-beam lithography, AXI and in-line 3D AFM.
- Six pneumatic servo actuators
- Independent, decoupled axes.
- Stage feedforward
- Counters forces from moving stages; settling under 1 second.
- Position
- ±10 µm static accuracy.
- Fab integration
- SEMI HSMS/SECS-II/GEM host connectivity.
- Turnkey
- Site survey, concrete design, installation and tuning.
Specifications
From DAEIL Systems' product page.
| Actuators | 6 pneumatic servo valves |
|---|---|
| Sensors | 9 accelerometers, 6 displacement sensors |
| Degrees of freedom | 6 |
| Active range | 0.5–150 Hz |
| Isolation at ≥ 4 Hz | ≥ 90% |
| Position accuracy | ±10 µm (static) |
| Power | 100–240 V AC, 100 W |
| Clean dry air | 5–6 bar, 250 L/min |
| DVIA-P550 | 215 × 160 × 170 mm; 550 kg |
|---|---|
| DVIA-P1000 | 240 × 240 × 170 mm; 1,000 kg |
| DVIA-P2200 | 350 × 350 × 110 mm; 2,200 kg |
| DVIA-P4000 | 420 × 420 × 110 mm; 4,000 kg |
| DVIA-P7000 | 450 × 450 × 120 mm; 7,000 kg |
| DVIA-P10000 | 400 × 465 × 240 mm; 10,000 kg |
| DVIA-P20000 | 645 × 600 × 284 mm; 20,000 kg |
