Tergeo-EM Plasma Cleaner
PIE Scientific Tergeo-EM: a benchtop plasma cleaner for TEM specimen holders, TEM/SEM samples, cryo-EM grids and in-situ chips, gentle enough for graphene.
Key features
- TEM holders
- Thermo Fisher, JEOL, Hitachi, TESCAN, Zeiss/LEO and more; two holders per front door.
- Gentle
- Downstream source delivers only neutral radicals; suitable for monolayer graphene and 1–3 nm carbon grids.
- Strong when needed
- Direct mode removes thick carbon deposits and ashes polyimide.
- Very low power
- Pulsed plasma with average power below 0.1 W.
- Holder storage
- Two holders stored under vacuum in the chamber.
- Recipes
- 20-recipe library, recipe lock and job sequences.
Specifications
From PIE Scientific's product page.
| Holders | Two per front door; adapters for other TEMs |
|---|---|
| Chamber | Quartz, 110 mm ID × 280 mm deep; 100 × 250 mm sample tray |
| RF power | 0–75 W or 0–150 W, 1 W steps; 13.56 MHz |
| Pulsed plasma | Duty 100% to below 1%, about 500 Hz |
| Etch-rate range | > 200 nm/min to < 0.01 nm/min |
| Gases | Air, Ar, O₂, H₂, N₂, water vapour, CF₄, SF₆; 2 MFCs standard, third optional |
| Control | 7-inch touchscreen (10-inch optional) |
| Pump | External oil-free dry pump |
| Size (W × H × D) | 450 × 250 × 430 mm |
| Weight | 20 kg without pump |
