CX-200K Full-Size SEM
COXEM CX-200K full-size SEM: < 3 nm resolution, up to 500,000× magnification, a 5-axis motorised stage and NanoStation 5 software.
Key features
- NanoStation 5
- All-new operating software for new and experienced users.
- Up to 500,000×
- High-magnification imaging with < 3 nm resolution.
- 5-axis motorised stage
- X, Y, Z, rotation and tilt (−20 to 90°), with stage memory and NaviCam.
- SE and BSE imaging
- Surface morphology and compositional contrast, with signal mixing.
- Chamber view
- ChamberCAM and a graphic display of sample height and working distance.
- Self-diagnostics
- Built-in self-diagnostic system.
- Options
- EDS, EBSD, cooling stage, STEM and the Air-Protection Module.
Specifications
From COXEM's product page.
| Electron gun | Tungsten filament (W) |
|---|---|
| Spatial resolution | < 3 nm |
| Magnification | 9× to 500,000× |
| Accelerating voltage | 1–30 kV (1 kV increments) |
| Sample stage | X 60 mm, Y 60 mm, Z 60 mm, R 360°, T −20 to 90° |
| Detectors | SE; BSE and EDS optional |
| Vacuum modes | HV; LV (20 Pa) and VP (10, 20, 30 Pa) optional |
| Vacuum system | Turbo pump (80 L) + rotary pump (100 L) |
| Dimensions (W × L × H), weight | 640 × 682 × 1,432 mm, 200 kg |
| Data output | JPG, TIFF, BMP |
| Software features | Panorama 3.0, auto focus, auto brightness and contrast, auto start, auto stigmation, Deep 3D (Live 3D) basic, signal mixing, triple display and save, line profile, image filtering, annotation tool, ChamberCAM |
|---|---|
| Options | EBSD, STEM, NaviCAM, Coolstage, LV (20 Pa), VP (10 / 20 / 30 Pa), NanofiberScanner, Nano Particle Analyzer, Deep 3D Pro, dynamic focus and tilt correction, Air-Protection Module, scroll pump |
