CX-300 Full-Size SEM
COXEM CX-300 full-size SEM for large-area work: a 100 × 100 mm stage, NaviCam and ChamberCam, and nano-particle analysis over large areas.
Key features
- Designed for large areas
- 100 × 100 mm stage travel for large samples and large-area analysis.
- Particle analysis
- Classifies nano-particles over large areas by size, distribution and composition, for example on membrane filters.
- Applications
- Engine oil, geological material, microplastics, airborne dust and coated paper.
- NaviCam and ChamberCam
- Convenient sample loading and navigation.
- Up to 500,000×
- < 3 nm resolution with a tungsten-filament gun.
- Quad display
- Four signals displayed and saved together.
Specifications
From COXEM's product page.
| Electron gun | Tungsten filament (W) |
|---|---|
| Spatial resolution | < 3 nm |
| Magnification | 9× to 500,000× |
| Accelerating voltage | 1–30 kV (1 kV increments) |
| Sample stage | X 100 mm, Y 100 mm, Z 60 mm, R 360°, T −20 to 90° |
| Detectors | SE; BSE and EDS optional |
| Vacuum modes | HV; LV (20 Pa) and VP (10, 20, 30 Pa) optional |
| Vacuum system | Turbo pump (80 L) + rotary pump (100 L) |
| Dimensions (W × L × H), weight | 640 × 690 × 1,460 mm, 200 kg |
| Data output | JPG, TIFF, BMP |
| Software features | Panorama 3.0, auto focus, auto brightness and contrast, auto start, auto stigmation, Deep 3D (Live 3D) basic, signal mixing, quad display and save, line profile, image filtering, annotation tool, ChamberCAM |
|---|---|
| Options | EBSD, STEM, NaviCAM, Coolstage, LV (20 Pa), VP (10 / 20 / 30 Pa), NanofiberScanner, Nano Particle Analyzer, Deep 3D Pro, dynamic focus and tilt correction, Air-Protection Module, scroll pump |
