SPT-20 Ion Sputter Coater
COXEM SPT-20: a compact DC sputter coater that deposits thin Au, Pt or Pt-Pd conductive layers on non-conductive SEM samples, with one-touch operation.
Key features
- DC sputtering
- Deposits a thin conductive layer to improve conductivity and protect the surface from beam damage.
- Targets
- Au, Pt, Pd and Pt-Pd.
- For tungsten and tabletop SEMs
- Also forms thin-film electrodes.
- One-touch
- Simple operation from an LCD touch panel.
- Reproducible
- Current feedback control for stable coatings.
- Compact
- Cost-effective benchtop unit.
Specifications
From COXEM's product page.
| Chamber size | Ø 100 mm |
|---|---|
| Target size | 50 mm |
| Targets | Au, Pt, Pt-Pd |
| Maximum ion voltage | 3 kV |
| Ion current | 0–9 mA |
| Coating time | 10–300 s |
| Dimensions (W × L × H), weight | 420 × 220 × 230 mm, 10 kg |
| Power | AC 110 or 220 V, 50/60 Hz, 300 W |
| Pump | Rotary pump (50 L), 14 kg |
