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DAEIL DVIF isolated foundation
Photos: DAEIL Systems

DVIF Vibration Isolated Foundation

DAEIL DVIF: an independent inertial foundation that anchors cleanroom tools to the structural slab instead of the raised floor, designed after a site survey.

Key features

Bypasses the raised floor
Connects to the structural slab, with a gap to the surrounding floor grid.
Stiff
Steel frame filled with reinforced concrete.
Engineered per tool
Mass and anchoring designed for the tool's load and centre of gravity.
Survey and modelling
Slab PSD measurement, structural mapping and FEA.
Cleanroom finish
Epoxy coating or stainless cladding; optional viscoelastic damping.

Specifications

From DAEIL Systems' product page.

DVIF
Gap to raised floor 10–20 mm typical
Critical mode control bandwidth 1–100 Hz
Structure Steel frame with reinforced concrete
Anchoring Chemical or mechanical anchors in the slab

Resources