Over 40 years of innovation history enables us to deliver foundation isolation systems with excellent performance and unmatched build quality at affordable prices in Australia and New Zealand. Our vibration isolation solutions have been chosen by leading Australian universities like The University of Sydney, Australian National University, The University of Melbourne, Monash University, Sydney NanoScience Hub (SNH-USYD), University of Technology Sydney, Queensland University of Technology, Griffith University, Australian National Fabrication Facility (ANFF), The University of Queensland, University of South Australia, Curtin University, The University of Western Australia, CSIRO, other Government labs and industry R&D facilities.
Speak to a NanoTech Solutions expert for your vibration isolation requirements. Let us help you find the right solution.
DVIF Series: Foundation Vibration Isolation Systems
The DVIF series is a foundation vibration isolation platform designed to isolate advanced, sophisticated tools in semiconductor fabrication plants from vibrations and high forces transmitted to the platform from dynamic stage operations.
During the production of electrical or photonic integrated circuits, the equipment is extremely sensitive to low-frequency vibrations caused by motorised stages involved in the wafer fabrication processes. Most instruments have strict environmental requirements that must be met to avoid any reduction in system throughput or overlay performance. Therefore, these tools must be rigidly anchored to the structural sub-floor of the building and separated from access floors causing significant vibrations. The structure of the supports is made of extremely rigid steel and the four corners of the supports are filled with concrete to increase the platform’s stability, rigidity, and stiffness.
The platform can be customised for a wide range of cleanroom processes and applications such as:
- Scanning Electron Microscopy
- Transmission Electron Microscopy
- Spectrometry Instruments
- Metrology Tools
Contact NTS for pre- and post-installation site surveys to design the optimal vibration isolation platform according to the specific application requirements.
