Advanced semiconductor fabrication and metrology processes such as EBL, photolithography, deposition, and etching, demand an environment free from acoustic noises and ground vibrations. Unsuppressed vibrations disrupt critical processes and significantly reduce output quality by causing defects, rework, equipment wear, process interruptions, and downtime.
Advanced vibration isolation systems are indispensable to all modern fabrication processes which require high precision and repeatability to ensure maximum yield, high process stability, and minimal risk of equipment malfunctions.
Our DAEIL catalogue of products are easy to install and require minimal adjustments to existing operations. These products are specifically designed to meet stringent process requirements to ensure high precision and stability.
Based on over 30 years of experience in supplying and installing cleanroom and sub-floor vibration isolation systems in semiconductor fabrication plants, we guarantee delivery of the highest quality products and improving the throughput of semiconductor manufacturing. Contact NTS for pre- and post-installation site surveys to design the optimal vibration isolation platform according to your specific application requirements.
Active Vibration Isolators
DVIA-P Series is built to provide vibration isolation for semiconductor manufacturing which can be used in Foundation Isolation Systems. In wafer fabrication processes, dynamic equipment are extremely sensitive to low-frequency vibrations caused by motorised linear stages. In these cases, the active vibration isolation system proactively anticipates and cancels the vibrations. The DVIA-P series also settles the residual movements of an isolated payload through pneumatic actuators, ensuring no compromises in the performance and operation of sensitive equipment.
Features and Benefits
- Optimal vibration solution for metrology tools with integrated linear stages
- Powerful pneumatic actuators to support moving stage applications
- Superior vibration isolation performance at low frequency range
- Fast settling time & excellent position accuracy
- Smart control system with Digital Signal Processor
- Maximum load capacity of 5000 kg per isolator
Process Compatibility
- CD-SEM
- Photomask Repair
- Photomask Qualification
- Automated AFM
- Mask Aligner
- X-Ray Metrology
- X-Ray Defect Inspection
- E-Beam Lithography System
- Non-Contact 3D Sufrace Metrology
- Thin Flim Thickness Metrology
Cleanroom Workstations for Microscopy and Metrology
The DVID-C series are high-performance workstations made of 304 stainless steel that prevent the production and/or dispersion of particles in air, making them ideal for providing pneumatic vibration control in Class 1 clean laboratories with controlled contamination levels.
These are available in two types: Workstation type and Armrest type. Customisation of size, location of isolated platform, and extra accessories, are available for a variety of purposes and requirements.
Cleanroom Foundation Isolation Systems
The DVIF series is designed to meet the strict environmental requirements for advanced, sophisticated tools in semiconductor fabrication plants. To avoid any reduction in system throughput or overlay performance, these tools are rigidly anchored to the structural sub-floor of the building and separated from access floors which cause significant vibrations. The structure of the supports is made of extremely rigid steel and the four corners of the supports are filled with concrete, increasing stability, rigidity, and stiffness.
‘Mount’ Type Pneumatic Vibration Isolators
The DVIM series of pneumatic vibration isolators are designed for ultra-precision tools with motorised linear stages. The pneumatic isolators provide significant damping to minimise the high forces of stage acceleration, avoiding any reduction in system throughput by delivering fast settling time and exceptional vibration isolation performance. They also have high-precision automatic levelling valves to keep the payload steady during dynamic stage motion.
The following three variants offer features suitable for a wide range of applications:
- DVIM-G Advanced Pneumatic Isolators: Superior vibration isolation performance, highest level of damping, and fastest payload settling time. Designed for advanced processes with the most stringent requirements.
- DVIM-M Standard Pneumatic Isolators: Excellent vibration isolation performance, standard damping level, and fast payload settling time. Designed for standard process requirements.
- DVIM-F Basic Pneumatic Isolators: Cost-effective solution with exceptional durability, providing basic damping level and payload settling time.
Air Springs for Industrial Machinery
Air Springs are cost-effective isolators that absorb high-frequency vibrations and environmental noise. They are easy to install and maintain, and provide adjustable rigidity, height, chamber volume, and bearing capacity, making it suitable for a wide range of large industrial equipment.
