Over 40 years of innovation history enables us to deliver pneumatic vibration isolators and air springs of unmatched build quality for dynamic stage applications at affordable prices in Australia and New Zealand. Our vibration isolation solutions have been chosen by leading Australian universities like The University of Sydney, Australian National University, The University of Melbourne, Monash University, Sydney NanoScience Hub (SNH-USYD), University of Technology Sydney, Queensland University of Technology, Griffith University, Australian National Fabrication Facility (ANFF), The University of Queensland, University of South Australia, Curtin University, The University of Western Australia, CSIRO, other Government labs and industry R&D facilities.

Speak to a NanoTech Solutions expert for your vibration isolation requirements. Let us help you find the right solution.

DVIM Series: ‘Mount’ Type Pneumatic Vibration Isolators

The DVIM series of pneumatic vibration isolators are designed for ultra-precision tools with motorised linear stages in Semiconductor and Electron Microscopy applications. To avoid any reduction in system throughput, the pneumatic isolators provide significant damping to minimise the high forces of stage acceleration and deliver fast settling time and exceptional vibration isolation performance. They are suitable for a wide range of R&D and industrial scale applications such as:

  • Semiconductor fabrication tools
  • Flat Panel Display metrology tools
  • Precision measuring tools with motorised linear stages
  • OEM Applications

 

Comparison of response time for DVIM isolators

Features and advantages

All DVIM products share the following features which make them ideal mounts for applications with dynamic stage motion:

  • Designed to support dynamic stage motion:
    • The centre of gravity of the payload shifts as the motorised linear stage travels. The speed controller that controls the air flow rate adjusts the stiffness of the pneumatic isolators to reduce the settling time. 
    • There is a trade-off between the resonant frequency and damping. As damping increases, the isolator’s natural frequency shifts higher and the efficiency of the vibration isolation is decreased.
      Schematic of DVIM Isolator function for dynamic stages
  • High-performance levelling valves

    • The air pressure of the pneumatic isolator is compressed by the high forces from dynamic stage motion. The levelling valves attached to the pneumatic isolator, automatically re-level the vibration isolation platform.

    • There are two valve options: The standard levelling valves with a repeatability of ±0.1 mm and the precision levelling valves with a repeatability of ±0.05 mm. We recommend the precision levelling valves if both the levelling accuracy and the re-leveling and settling time are requirements of tools.
  • External/built-in oil dampers:
    • Oil dampers increase the stiffness of the isolation platform to resist the high forces from stage acceleration and dampen residual vibrations.
    • The DVIM-G has external G-Oil Dampers. The DVIM-M and DVIM-F have built-in oil dampers.

DVIM-G Advanced Pneumatic Vibration isolator

DVIM-G: Advanced Pneumatic Vibration Isolators

The DVIM–G series is an advanced pneumatic vibration isolator, providing the highest damping level, fastest payload settling time, and superior vibration isolation performance among the DVIM series. The following 

  • Superior vibration isolation performance: The DVIM-G employs a special mechanical filter system and a unique design to effectively reduce low-frequency vibrations by lowering its natural frequency as much as possible. This achieves 90 – 99%  isolation at 10 Hz.
  • Dual Chamber System with orifices: The DVIM-G consists of an air chamber and a damping chamber connected by two orifices which control the airflow between them to increase damping efficiency and reduce settling time. The orifices dissipate energy in the air, effectively damping the system.
  • External G-Oil dampers: Installed with stoppers to limit the linear stage from moving beyond certain stroke ranges in the three horizontal directions. The viscosity of the oil can be adjusted to change the stiffness of the isolators, to further increase damping and reduce settling time.

DVIM-M Standard Pneumatic Vibration isolator

DVIM-M: Standard Pneumatic Vibration Isolators

The DVIM-M series is a standard pneumatic vibration isolator, offering excellent vibration isolation performance and damping for fast payload settling time. It has the following features:

  • Excellent vibration isolation performance: The DVIM-M provides excellent vibration isolation performance in a wide range of frequencies achieving 80 – 90%  isolation at 10 Hz.
  • Dual Chamber System with orifices: The DVIM-M consists of an air chamber and a damping chamber connected by two orifices which control the airflow between them to increase damping efficiency and reduce settling time. The orifices dissipate energy in the air, effectively damping the system.
  • Optional built-in oil dampers: Can be installed with stoppers to limit the linear stage from moving beyond certain stroke ranges in the three horizontal directions. The viscosity of the oil can be adjusted to change the stiffness of the isolators, to further increase damping and reduce settling time.

DVIM-F Basic Pneumatic Isolator

DVIM-F: Basic Pneumatic Vibration Isolators

The DVIM-F series is a basic pneumatic vibration isolator incorporating bellow air springs, designed and built for durability, performance, and value. It has the following features:

  • Cost-effective solution for fundamental needs: The DVIM-F pneumatic isolators are suitable for applications requiring less vibration isolation, damping, and settling time, but high durability.
  • Exceptional Durability: The bellows air springs are designed to perform in the toughest conditions in the long term.
  • Optional built-in oil dampers: Can be installed with stoppers to limit the linear stage from moving beyond certain stroke ranges in the three horizontal directions. The oil’s viscosity can be adjusted to change the stiffness of the isolators, to increase damping, and to reduce settling time further.

Specifications

Custom platforms and geometries with DVIM-M isolators

Specifications for DVIM-M isolators

Air Springs

Air Springs

Air springs are excellent in absorbing high frequency vibration and environmental noise, finding multiple uses wherever there is a need for absorbing shock, controlling strokes, and damping. They can be easily installed and maintained, and they provide excellent durability. Between effective strokes, the rigidity, height, chamber volume, and bearing capacity of the air spring can be adjusted by increasing and decreasing the internal air pressure. This makes them highly cost-effective solutions compared to pneumatic vibration isolators.

They are designed and built to operate dependably in the toughest conditions in a wide range of industrial applications such as:

  • Electronic Equipment 
  • Control Device 
  • Press Machine 
  • Industrial Washing Machine 
  • Industrial Centrifuge 
  • Vibration Screen 
  • Automatic Control Console 
  • Vibration Grinder 
  • Pneumatic Lifting Platform