DVIM-G Advanced Pneumatic Isolator
DAEIL DVIM-G: the flagship pneumatic isolator for metrology and inspection tools with moving stages, 1.5–3.0 Hz, 500 to 6,000 kg per isolator.
Key features
- Dual-chamber damping
- Internal and adjustable external orifices absorb stage-acceleration energy.
- Gimbal piston
- Low-friction inverted pendulum isolates horizontal disturbances.
- Low frequency
- 80–90% isolation at 5 Hz.
- Options
- External oil damper, air-operated valve, precision levelling.
Specifications
From DAEIL Systems' product page.
| Natural frequency | 1.5–3.0 Hz |
|---|---|
| Isolation | 80–90% at 5 Hz; 90–99% at 10 Hz |
| Levelling repeatability | ±1.0 mm standard; ±0.05 mm precision valve |
| DVIM-G-500 | 220 × 220 × 180 mm; 500 kg |
|---|---|
| DVIM-G-1000 | 280 × 280 × 180 mm; 1,000 kg |
| DVIM-G-1500 | 320 × 320 × 180 mm; 1,500 kg |
| DVIM-G-2000 | 350 × 350 × 180 mm; 2,000 kg |
| DVIM-G-3000 | 430 × 430 × 185 mm; 3,000 kg |
| DVIM-G-4500 | 488 × 488 × 185 mm; 4,500 kg |
| DVIM-G-6000 | 548 × 548 × 185 mm; 6,000 kg |
