Alpha-Step D-500 Stylus Profiler
KLA Alpha-Step D-500: a compact benchtop stylus profiler for 2D step height, roughness, bow and stress, with low force for soft materials such as photoresist.
Key features
- Optical lever sensor
- High resolution, large vertical range and low-force measurement.
- Direct measurement
- Independent of material properties, with adjustable force and a choice of styli.
- Corrections
- Keystone correction for the side-view optics; arc correction for the stylus motion.
- Compact
- The smallest footprint of KLA's benchtop stylus profilers.
- Applications
- 2D step height, roughness and waviness, bow and shape, and thin-film stress.
Specifications
From KLA Instruments' product page.
| Measurement | 2D |
|---|---|
| Step height | Nanometres to 1200 µm |
| Stylus force | 0.03 to 15 mg |
| Camera | 5 MP high-resolution colour |
| Stylus tip radius | 100 nm to 50 µm (diamond); included angle 20 to 100° |
| Chucks | Standard chuck for samples up to 140 mm; universal vacuum chuck for 50 to 125 mm |
| Step height standards | 8 nm to 250 µm (VLSI Standards, NIST traceable) |
Resources
Webinars and videos
From the manufacturer's own channels.
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Webinar · 14 September 2021 · KLA Instruments
