HRP-260 Stylus Profiler
KLA HRP-260: a cassette-to-cassette stylus profiler with long scans up to 200 mm and a high-resolution piezo stage for AFM-like measurement of small features.
Key features
- Dual stage
- Long scans up to 200 mm, plus a high-resolution piezo stage with resolution similar to AFM.
- Wafer handler
- Loads 75 to 200 mm opaque (e.g. silicon) and transparent (e.g. sapphire) samples automatically.
- Optics
- In-line low and high magnification optics.
- Production capability
- Fully automated with sequencing, pattern recognition and SECS/GEM.
Specifications
From KLA Instruments' product page.
| Step height | Nanometres to 327 µm |
|---|---|
| Stylus force | 0.03 to 50 mg, constant force control |
| Long scan | Up to 200 mm without stitching |
| High-resolution stage | 90 × 90 µm scan range, 1 nm resolution |
| Wafer handler | Cassette-to-cassette, 75 to 200 mm, opaque and transparent |
| Stylus tip radius | 20 nm to 50 µm (diamond); included angle 20 to 100° |
| Step height standards | 8 nm to 100 µm on 200 mm Si wafers (VLSI Standards, NIST traceable) |
Resources
Webinars and videos
From the manufacturer's own channels.
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Webinar · 22 September 2020 · KLA Instruments
Automated Step Height Metrology for Production Process Monitoring
