KLA iNano compact nanoindenter with the InForce 50 actuator (50 mN, 50 µm) for hardness, modulus, mapping and dynamic tests.
Key features
- InForce 50 actuator
- Capacitive displacement measurement and electromagnetic force actuation, with interchangeable tips.
- iQWave2 controller
- 100 kHz data acquisition and 16 µs time constant.
- Compact
- Vibration isolation gantry built into the enclosure.
- Tip calibration
- Software-integrated tip calibration.
- Standards
- ISO 14577 and standardised test methods in the InView software.
- Applications
- Hardness and modulus (Oliver-Pharr), thin films, high-speed property maps, polymer tan delta and storage and loss modulus, and high-temperature testing.
Specifications
From KLA Instruments' product page.
| Actuator | InForce 50 |
|---|---|
| Maximum force | 50 mN |
| Displacement range | 50 µm |
| Data acquisition | 100 kHz, 16 µs time constant (iQWave2) |
| Sample stage travel | 100 mm in X and Y, 25 mm in Z |
| Sample heating (option) | Up to 300 °C, with inert gas backfill |
Resources
Webinars and videos
From the manufacturer's own channels.
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Webinar · 18 September 2026 · KLA Instruments
Designing Custom Nanoindentation Experiments using Method Editor
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Webinar · 13 May 2026 · KLA Instruments
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Webinar · 12 December 2024 · KLA Instruments
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Webinar · 1 September 2022 · KLA Instruments
Thin Films & Coatings Technology Symposium: Adhesion of Low-k Films on Si by Nano-scratch
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Webinar · 8 September 2021 · KLA Instruments
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Webinar · 22 July 2021 · KLA Instruments
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Webinar · 14 October 2020 · KLA Instruments
Indentation University Session 17: High Speed Nanoindentation
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Webinar · 10 April 2020 · KLA Instruments
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Webinar · 12 June 2019 · KLA Instruments
Indentation University Session 3: Basic Nanoindentation Theory


