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KLA Nano Indenter G200X
Images: KLA Instruments

Nano Indenter G200X

KLA Nano Indenter G200X: KLA's highest-performing motion system, largest sample mounting and modular options up to high temperature.

Key features

Electromagnetic actuation
High dynamic range in force and displacement, with no lateral displacement artefacts.
Motion and optics
KLA's highest-performing XYZ motion system and a high-resolution optical microscope for targeting.
Throughput
Sample tray with multiple positions, and high-speed testing for property maps.
Modular options
Continuous stiffness measurement (CSM), SPM imaging, scratch and wear, frequency sweeps, electrical (I-V), high-speed, impact and high-temperature testing.
Software
InView with ReviewData and InFocus reporting; ISO 14577 test method included.
Applications
Hardness and modulus, thin films and coatings, adhesion, fracture toughness, viscoelastic properties and yield stress and strain.

Specifications

From KLA Instruments' product page.

Nano Indenter G200X
XP indentation head 500 mN loading; < 0.01 nm (10 pm) displacement resolution; > 500 µm maximum indentation depth
InForce actuators (options) InForce 1000 (up to 1000 mN) and InForce 50 (up to 50 mN)
Data acquisition 100 kHz, 16 µs time constant (iQWave2)
Sample stage travel 100 mm in X and Y, 25 mm in Z
Survey scanning (option) Up to 500 × 500 µm, 10 nm linear encoders
Sample heating (option) Up to 300 °C, with inert gas backfill

Resources

Webinars and videos

From the manufacturer's own channels.

Applications