KLA Nano Indenter G200X: KLA's highest-performing motion system, largest sample mounting and modular options up to high temperature.
Key features
- Electromagnetic actuation
- High dynamic range in force and displacement, with no lateral displacement artefacts.
- Motion and optics
- KLA's highest-performing XYZ motion system and a high-resolution optical microscope for targeting.
- Throughput
- Sample tray with multiple positions, and high-speed testing for property maps.
- Modular options
- Continuous stiffness measurement (CSM), SPM imaging, scratch and wear, frequency sweeps, electrical (I-V), high-speed, impact and high-temperature testing.
- Software
- InView with ReviewData and InFocus reporting; ISO 14577 test method included.
- Applications
- Hardness and modulus, thin films and coatings, adhesion, fracture toughness, viscoelastic properties and yield stress and strain.
Specifications
From KLA Instruments' product page.
| XP indentation head | 500 mN loading; < 0.01 nm (10 pm) displacement resolution; > 500 µm maximum indentation depth |
|---|---|
| InForce actuators (options) | InForce 1000 (up to 1000 mN) and InForce 50 (up to 50 mN) |
| Data acquisition | 100 kHz, 16 µs time constant (iQWave2) |
| Sample stage travel | 100 mm in X and Y, 25 mm in Z |
| Survey scanning (option) | Up to 500 × 500 µm, 10 nm linear encoders |
| Sample heating (option) | Up to 300 °C, with inert gas backfill |
Resources
Webinars and videos
From the manufacturer's own channels.
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Webinar · 18 September 2026 · KLA Instruments
Designing Custom Nanoindentation Experiments using Method Editor
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Webinar · 13 May 2026 · KLA Instruments
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Webinar · 12 December 2024 · KLA Instruments
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Webinar · 1 September 2022 · KLA Instruments
Thin Films & Coatings Technology Symposium: Adhesion of Low-k Films on Si by Nano-scratch
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Webinar · 8 September 2021 · KLA Instruments
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Webinar · 22 July 2021 · KLA Instruments
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Webinar · 14 October 2020 · KLA Instruments
Indentation University Session 17: High Speed Nanoindentation
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Webinar · 10 April 2020 · KLA Instruments
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Webinar · 12 June 2019 · KLA Instruments
Indentation University Session 3: Basic Nanoindentation Theory


