Tencor P-17 Stylus Profiler
KLA Tencor P-17: an eighth-generation benchtop stylus profiler for 2D and 3D step height, roughness, bow and stress, with scans up to 200 mm without stitching.
Key features
- Measurement stability
- UltraLite sensor, constant force control and an ultra-flat scanning stage.
- No stitching
- Scans the full sample, up to 200 mm, in one pass.
- Easy set-up
- Point-and-click stage control, top and side view optics and a camera with optical zoom.
- Production capability
- Fully automated with sequencing, pattern recognition, feature detection and SECS/GEM.
- P-17 OF
- Open-frame version for larger samples: 300 mm wafers or a 240 × 240 mm chuck.
Specifications
From KLA Instruments' product page.
| Step height | Nanometres to 1000 µm |
|---|---|
| Stylus force | 0.03 to 50 mg, constant force control |
| Scan length | Up to 200 mm without stitching |
| Camera | 5 MP high-resolution colour |
| Stylus tip radius | 40 nm to 50 µm (diamond); included angle 20 to 100° |
| Chuck | Universal vacuum chuck for 50 to 200 mm samples |
| Step height standards | 8 nm to 250 µm (VLSI Standards, NIST traceable) |
Resources
Webinars and videos
From the manufacturer's own channels.
-
Webinar · 14 September 2021 · KLA Instruments
-
Webinar · 13 April 2021 · KLA Instruments
-
Webinar · 22 September 2020 · KLA Instruments
Automated Step Height Metrology for Production Process Monitoring
