Tencor P-7 Stylus Profiler
KLA Tencor P-7 benchtop stylus profiler: 2D and 3D step height, roughness, bow and stress, with 150 mm scans without stitching.
Key features
- Constant force control
- Low force from 0.03 to 50 mg.
- No stitching
- Scans the full sample, up to 150 mm, in one pass.
- 2D and 3D
- Step height, roughness and waviness, bow and shape, stress and defect review.
- Production capability
- Fully automated with sequencing, pattern recognition and SECS/GEM.
Specifications
From KLA Instruments' product page.
| Step height | Nanometres to 1000 µm |
|---|---|
| Stylus force | 0.03 to 50 mg, constant force control |
| Scan length | Up to 150 mm without stitching |
| Camera | 5 MP high-resolution colour |
| Stylus tip radius | 100 nm to 50 µm (diamond); included angle 20 to 100° |
| Chuck | Universal vacuum chuck for 50 to 150 mm samples |
| Step height standards | 8 nm to 250 µm (VLSI Standards, NIST traceable) |
Resources
Webinars and videos
From the manufacturer's own channels.
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Webinar · 14 September 2021 · KLA Instruments
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Webinar · 13 April 2021 · KLA Instruments
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Webinar · 22 September 2020 · KLA Instruments
Automated Step Height Metrology for Production Process Monitoring
