Description
| Diffraction Grating TDG01 |
Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
| Grating description | |
| Structure: | – glass wafer – the grating is formed on the layer of chalcagenid glass – the grating top surface is aluminium |
| Pattern types: | 1- Dimensional (in the X or Y direction) |
| Pattern height: | > 55 nm provides good image contrast |
| Geometry: | parallel ridges |
| Period: | 278 nm (3600 periods/mm) |
| Accuracy: | ±1nm |
| Size: | diameter 12,5 mm, thickness – 2,5 mm |
| Effective area: | central diameter 9 mm. |
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