EM-30N Tabletop SEM
COXEM's most popular tungsten-filament tabletop SEM: 5th-generation DSP imaging, < 5 nm resolution, Panorama wide-area scanning and low vacuum.
Key features
- Low-noise imaging
- 5th-generation digital signal processing for clear, low-noise images at high magnification.
- Panorama mode
- Wide-area scanning at high magnification.
- Low vacuum (option)
- Image non-conductive samples without coating.
- SE and BSE together
- Dual display and signal mixing show surface form and composition in one view.
- Duplex Navi
- Navigate from the NaviCam or holder map, a low-magnification MiniMap, or by clicking in the live image.
- Quick set-up
- Optimised brightness and contrast in 1 second; line-profile measurement tool.
- EBSD-ready
- COXEM describes it as the first tabletop SEM to integrate with a compact EBSD.
Specifications
From COXEM's product page.
| Electron gun | Tungsten filament (W) |
|---|---|
| Spatial resolution | < 5 nm |
| Magnification | 15× to 150,000× |
| Accelerating voltage | 1–30 kV (1 kV increments) |
| Sample stage | X 35 mm, Y 35 mm, tilt 0–45°, 3-axis motorised |
| Detectors | SE; BSE and EDS optional |
| Vacuum modes | HV; LV optional |
| Vacuum system | Turbo pump (80 L) + rotary pump (100 L) |
| Dimensions (W × L × H) | 400 × 630 × 600 mm |
| Weight | 95 kg |
| Data output | JPEG, TIFF, BMP |
| Software features | Panorama 1.0, auto start, auto focus, auto brightness and contrast, signal mixing, dual display and save, line profile, image filtering, annotation tool |
|---|---|
| Options | STEM, NaviCAM, Coolstage, LV (20 Pa), Panorama 2.0, diaphragm pump |
