EM-40 Tabletop SEM
COXEM's latest tabletop SEM: Nanostation V5 software, imaging at up to 13 frames per second, < 5 nm resolution and a motorised X, Y, Z stage.
Key features
- Nanostation V5
- New operating software with 5th-generation signal processing; imaging, analysis and data management in one interface.
- Fast imaging
- Crisp, high-resolution images at up to 13 frames per second.
- Motorised stage
- Motorised X, Y and Z stage with enhanced auto focus for quick, precise navigation.
- Variable pressure (option)
- 10, 20 or 30 Pa to suppress charging, so non-conductive samples can be imaged without coating.
- NaviCAM
- Optical images saved automatically while the sample loads, for easy navigation.
- Deep3D
- 3D reconstruction and height analysis from BSE images.
- Large-area imaging
- Automated scanning and stitching of large areas.
- Options
- EBSD, STEM, cooling stage and the Nano-Particle Analyzer.
Specifications
From COXEM's product page.
| Electron gun | Tungsten filament (W) |
|---|---|
| Spatial resolution | < 5 nm |
| Magnification | 13× to 250,000× |
| Accelerating voltage | 1–30 kV (1 kV increments) |
| Sample stage | X 40 mm, Y 40 mm, Z 40 mm, 3-axis motorised |
| Detectors | SE; BSE and EDS optional |
| Vacuum modes | HV; LV and VP optional |
| Vacuum system | Turbo pump (80 L) + rotary pump (100 L) |
| Dimensions (W × L × H) | 315 × 560 × 580 mm |
| Weight | 81.5 kg |
| Data output | JPEG, TIFF, BMP |
| Software features | Panorama 3.0, auto start, auto focus, 1-second auto brightness and contrast, signal mixing, triple display and save, line profile, image filtering, annotation tool, Deep 3D (Live 3D) basic, auto stigmation |
|---|---|
| Options | EBSD, STEM, NaviCAM, Coolstage, LV (20 Pa), VP (10 / 20 / 30 Pa), NanofiberScanner, Nano Particle Analyzer, Deep 3D Pro, dynamic focus and tilt correction, diaphragm pump |
