DVIA-M Built-In Active Vibration Isolation
DAEIL DVIA-M: a built-in active vibration isolation module for integration into electron microscopes and metrology platforms, six axes from 0.5 Hz.
Key features
- Built in
- For OEM integration into electron microscopes and metrology platforms.
- Six axes from 0.5 Hz
- Feedback and feedforward control, each axis decoupled; detection down to 0.3 Hz.
- Fast DSP
- 1800 MFLOPS real-time processing with 0.5 ms response.
- Stable
- Sub-micron translational and sub-microradian angular stability; magnetic field below 0.05 μT.
- Custom
- Dimensions and load capacity to suit the instrument.
Specifications
From DAEIL Systems' product page.
| Dimensions | Customisable |
|---|---|
| Control | Feedback and feedforward |
| Degrees of freedom | 6 (X, Y, Z, θx, θy, θz) |
| Active isolation bandwidth | 0.5–200 Hz |
| Vibration isolation | 80–90% at 1 Hz |
| Actuators | Electromagnetic; 40 N vertical, 20 N horizontal |
| Sensor | Geophone, 2.55 V/in/s (100.4 V/m/s) ±10% |
| Levelling repeatability | ±0.1 mm |
| Controller | External |
| Certification | CE, TÜV |
| Power | 100–260 V AC, 50/60 Hz |
| Air | 4–6 bar, 10 L/min |
| Environment | 5–50 °C, 20–90% RH |
| DVIA-M1000 | 1,500 kg max load |
|---|---|
| DVIA-M3000 | 3,000 kg max load |
