DVIA-ML Active Vibration Isolation
DAEIL DVIA-ML: active vibration isolation for SEM, TEM and cryo-EM, controlling six axes from 0.5 Hz; each system is configured to the microscope and site.
Key features
- For electron microscopes
- SEM, TEM and cryo-EM, as well as X-ray metrology, e-beam lithography and NMR.
- Six axes
- Feedback and feedforward control of X, Y, Z, θx, θy and θz.
- From 0.5 Hz
- Active isolation bandwidth 0.5–200 Hz; 80–90% isolation at 1 Hz.
- Fast
- Response time under 0.5 ms, with a built-in controller.
- Monitoring
- Real-time interface with automatic logging, trend review and report export.
- Configured to site
- Dimensions and mounting made to suit the instrument, floor and facility.
Specifications
From DAEIL Systems' product page.
| Control | Feedback and feedforward |
|---|---|
| Degrees of freedom | 6 (X, Y, Z, θx, θy, θz) |
| Active isolation bandwidth | 0.5–200 Hz |
| Vibration isolation | 80–90% at 1 Hz |
| Actuators | Electromagnetic |
| Sensors | Geophone, 2.55 V/in/s (100.4 V/m/s) ±10% |
| Levelling repeatability | ±0.1 mm |
| Response time | < 0.5 ms |
| Controller | Built-in |
| Certification | CE, TÜV |
| Environment | 5–50 °C, 20–90% RH |
| Dimensions | Customisable |
| DVIA-ML1000 | 1,500 kg max load; actuator force 40 N vertical, 20 N horizontal; 100–260 V AC; air 4–6 bar, 10 L/min |
|---|---|
| DVIA-ML3000 | 3,000 kg max load; actuator force 40 N vertical, 20 N horizontal; 100–260 V AC; air 4–6 bar, 10 L/min |
| DVIA-ML6000 | 6,000 kg max load; actuator force 80 N vertical, 40 N horizontal; 100–240 V AC single-phase, 100 W; air 5–6 bar, 250 L/min |
