Skip to content
KLA Filmetrics Profilm3D optical profiler
Images: KLA Instruments

Profilm3D Optical Profiler

KLA Filmetrics Profilm3D and Profilm3D-200: affordable white light interferometers for non-contact 3D surface topography with sub-nanometre resolution.

Request a quote (08) NANO TECH Manufacturer's product page Profilm3D on kla.com

Key features

Interferometry
Vertical scanning and phase shifting interferometry, from nanometres to millimetres.
TotalFocus
3D natural-colour images with every pixel in focus through the measured range.
True-Color imaging
Shows the sample's real colours, helpful for subtle or buried features.
Enhanced Roughness Mode
Better fidelity on sloped surfaces such as lenses, and on rough or low-reflectivity surfaces.
Automation
Automated focus with long piezo travel, and a long-travel XY stage for mapping and stitching.

Specifications

From KLA Instruments' product page.

Profilm3D series
XY stage travel 100 × 100 mm (Profilm3D); 200 × 200 mm (Profilm3D-200)
Z stage range 100 mm
Objectives Four-position turret, 5× (Michelson) to 100×; 10× to 100× Mirau
Wafer stage (option) Manual R-theta stage for 50 to 200 mm wafers
Step height standards 10 µm Cr on Si; optional multi-step 0.1, 2 and 4 µm

Resources

Webinars and videos

From the manufacturer's own channels.

Applications