Zeta-20 Optical Profiler

KLA Zeta-20 benchtop 3D optical profiler with ZDot and Multi-Mode optics: step height, roughness, film thickness and defects.

Key features

ZDot: Collects a high-resolution 3D scan and a True Color infinite-focus image at the same time.
Interferometry (ZI): Phase and vertical scanning interferometry (PSI and VSI) for wide-area measurements with high Z resolution.
Interference contrast (ZIC, ZSI): Nomarski interference contrast and shearing interferometry for surfaces with sub-nanometre roughness.
Film thickness (ZFT): Integrated broadband reflectometer for transparent single- and multi-layer films.
Defect inspection and review: Automated optical inspection, and KLARF files to drive the stage to defects for 3D review.
Production capability: Fully automated measurements with sequencing and pattern recognition.
Zeta-20HR: High-resolution configuration for solar cell metrology, with a 230 mm × 230 mm stage and solar texture analysis.

Measurement
Step height	Nanometres to millimetres
Transparent film thickness (ZFT)	30 nm to 100 µm
Transparent film thickness (ZDot)	Films thicker than 10 µm
Defect inspection	Defects larger than 1 µm
Stress	2D thin-film stress

Optics and standards
Objectives	2.5× to 150×, plus long and ultra-long working distance objectives
Optical couplers	1×, 0.35×, 0.5× or 0.63×
Step height standards	8 nm to 250 µm (VLSI Standards, NIST traceable)

From the manufacturer's own channels.