Skip to content
KLA Zeta-300 3D optical profiler
Images: KLA Instruments

Zeta-300 Optical Profiler

KLA Zeta-300: the Zeta-20's ZDot and Multi-Mode optics with integrated isolation and a larger, configurable stage for bigger samples, in R&D and production.

Request a quote (08) NANO TECH Manufacturer's product page Zeta-300 on kla.com

Key features

ZDot
Collects a high-resolution 3D scan and a True Color infinite-focus image at the same time.
Interferometry (ZI)
Phase and vertical scanning interferometry (PSI and VSI) for wide-area measurements with high Z resolution.
Interference contrast (ZIC, ZSI)
Nomarski interference contrast and shearing interferometry for surfaces with sub-nanometre roughness.
Film thickness (ZFT)
Integrated broadband reflectometer for transparent single- and multi-layer films.
Defect inspection and review
Automated optical inspection, and KLARF files to drive the stage to defects for 3D review.
Production capability
Fully automated measurements with sequencing and pattern recognition.
Larger samples
Optional 280 mm Z tower for large parts, and manual or motorised XY stages.

Specifications

From KLA Instruments' product page.

Measurement
Step height Nanometres to millimetres
Transparent film thickness (ZFT) 30 nm to 100 µm
Transparent film thickness (ZDot) Films thicker than 10 µm
Defect inspection Defects larger than 1 µm
Stress 2D thin-film stress
Stages and isolation
XY stage Manual 300 mm travel, or motorised 150 or 200 mm travel
Z tower (option) 280 mm, for large parts
Isolation Passive isolation built into the base; active isolation table optional
Acoustic enclosure Optional
Optics and standards
Objectives 2.5× to 150×, plus long and ultra-long working distance objectives
Optical couplers 1×, 0.35×, 0.5× or 0.63×
Step height standards 8 nm to 250 µm (VLSI Standards, NIST traceable)

Resources

Webinars and videos

From the manufacturer's own channels.

Applications