Skip to content
KLA Zeta-Solar optical profiler
Images: KLA Instruments

Zeta-Solar Optical Profiler

KLA Zeta-Solar: an optical profiler built for solar cell metallization metrology, measuring finger lines, busbars and contact pads on cells up to 230 × 230 mm.

Request a quote (08) NANO TECH Manufacturer's product page Zeta-Solar on kla.com

Key features

Finger and busbar metrology
Optimised height and width measurements, with statistics and pass/fail output.
High Dynamic Range (HDR)
Measures highly reflective metal lines on ultra-low-reflectivity textured surfaces.
Automatic stitching
Large fields of view for busbars and contact pads.
Large cells
Programmable stage for 230 × 230 mm cells, as well as half cells and earlier generations.
True Color 3D
Every pixel in focus, to tell apart materials with different optical properties.
Software
Profilm software combined with the metallization measurements developed for other Zeta systems.

Specifications

From KLA Instruments' product page.

Zeta-Solar
Sample size Solar cells up to 230 × 230 mm, plus half cells
Objectives Four-position manual turret, 5× (Michelson) to 50×; 10×, 20× and 50× Mirau
Applications Finger line, busbar and contact/bond pad metrology; True Color imaging
Isolation (option) Accurion Nano30 active tabletop isolation
Step height standards 10 µm Cr on Si; optional multi-step 0.1, 2 and 4 µm

Resources

Webinars and videos

From the manufacturer's own channels.

Applications