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KLA NanoFlip in-situ nanoindenter
Images: KLA Instruments

NanoFlip In-Situ Nanoindenter

KLA NanoFlip: nanomechanical testing inside an SEM or FIB, in vacuum or air, with a flip mechanism and FIB-to-Test.

Request a quote (08) NANO TECH Manufacturer's product page NanoFlip on kla.com

Key features

In situ in SEM and FIB
Pillar compression, nanoindentation and other tests, in vacuum or ambient conditions.
FIB-to-Test
Tilts the sample 90° to move from FIB milling to testing without removing it.
Flip mechanism
Positions the sample for testing or for imaging.
Synchronised imaging
SEM video recorded in InView and synchronised with the test data.
InForce 50 actuator
Capacitive displacement measurement and electromagnetic force actuation, with interchangeable tips.
Test methods
Pre-programmed methods, plus a method developer for your own experiments.

Specifications

From KLA Instruments' product page.

NanoFlip
Actuator InForce 50 (up to 50 mN)
Data acquisition 100 kHz, 16 µs time constant (iQWave2)
High-speed events (DataBurst) Displacement recorded at more than 1 kHz
Dynamic excitation (CSM) 0.1 Hz to 1 kHz
Sample stage travel 21 mm in X and Y, 25 mm in Z
Environment Vacuum (SEM, FIB) or ambient

Resources

Webinars and videos

From the manufacturer's own channels.

Applications