Tergeo-Plus Plasma Cleaner
PIE Scientific Tergeo-Plus: a tabletop plasma cleaner, etcher and asher with a larger chamber for a 4-inch wafer boat plus a 6-inch wafer.
Key features
- Larger chamber
- Holds a 4-inch wafer boat plus one 6-inch wafer.
- Two plasma sources
- Direct and remote (downstream), each with its own plasma strength sensor.
- Pulsed plasma
- Duty cycle from 100% down to below 1%.
- High-purity quartz
- Quartz tube and 2 mm quartz sample holder; external electrodes reduce metal sputtering.
- Recipes
- 20 recipes and job sequences of up to three steps.
Specifications
From PIE Scientific's product page.
| Chamber | 160 mm ID (170 mm OD) × 280 mm deep |
|---|---|
| RF power options | 150 W, 300 W or 500 W, 1 W steps |
| RF frequency | 13.56 MHz, automatic impedance matching |
| Plasma modes | Direct (capacitively coupled) and downstream; continuous or pulsed, duty cycle 100% to below 1% |
| Gas inputs | Up to 3 mass flow controllers, plus a vent port |
| Gas flow | 0–100 sccm per MFC; ¼-inch Swagelok |
| Display | 7-inch touchscreen |
| Power | 110–230 V AC |
| Pump requirement | NW/KF25 port; ≥ 2.0 cfm; ≤ 50 mTorr |
