Tergeo-Pro Plasma Cleaner
PIE Scientific Tergeo-Pro: the largest Tergeo, with a Ø 230 × 340 mm quartz chamber for one 8-inch wafer or batches in wafer boats.
Key features
- 8-inch wafers and batches
- One 8-inch wafer, or one or two 25/50-slot 6- or 4-inch wafer boats.
- Large sample plate
- 220 × 280 mm quartz plate for large PCBs, optics and trays of parts.
- Front-loading door
- Thick-walled high-purity quartz chamber.
- End-point indication
- Plasma intensity sensor for ashing.
- Same controls
- Runs the processes and touchscreen interface of the Tergeo family.
Specifications
From PIE Scientific's product page.
| Chamber | Quartz, 230 mm ID (240 mm OD) × 340 mm deep, front-loading |
|---|---|
| Sample plate | 4 mm quartz, 220 × 280 mm |
| RF power options | 150 W, 300 W or 500 W, 1 W steps |
| RF frequency | 13.56 MHz, automatic impedance matching |
| Plasma modes | Direct (capacitively coupled) and downstream; continuous or pulsed, duty cycle 100% to below 1% |
| Gas inputs | Up to 3 mass flow controllers, plus a vent port |
| Gas flow | 0–100 sccm per MFC; ¼-inch Swagelok |
| Recipes | 20, with job sequences of up to 3 steps |
| Power | 110–230 V AC, single phase |
| Pump requirement | NW/KF25 port; ≥ 3.5 cfm; ≤ 50 mTorr |
