Tergeo Plasma Cleaner
PIE Scientific Tergeo: a compact, fully automatic plasma cleaner for removing organic contamination, surface activation, ashing and descum.
Key features
- Direct and downstream
- Fast capacitively coupled cleaning, or gentle downstream mode for delicate samples.
- Pulsed plasma
- Duty cycle from 100% down to below 1%.
- Plasma sensor
- Real-time intensity monitoring for repeatable recipes and end-point detection.
- Many gases
- Oxygen, argon, hydrogen, nitrogen, CF₄, SF₆, water vapour and more.
- Automatic
- Recipe-based operation from a 7-inch touchscreen or PC.
Specifications
From PIE Scientific's product page.
| RF power | 0–75 W or 0–150 W, 1 W steps |
|---|---|
| RF frequency | 13.56 MHz, automatic impedance matching |
| Plasma modes | Direct (capacitively coupled) and downstream; continuous or pulsed, duty cycle 100% to below 1% |
| Gas inputs | Up to 3 mass flow controllers, plus a vent port |
| Chamber | Quartz, 110 mm ID × 280 mm deep |
| Pressure sensor | Corrosion-resistant platinum-filament Pirani |
| Interface | 7-inch touchscreen or Windows PC |
| Dimensions (W × H × D) | 450 × 250 × 430 mm |
| Weight | approx. 20 kg |
| Power | 90–230 V AC, single phase, 10 A |
