ELECTRON MICROSCOPY – NanoTechnology Solutions®

Benchtop SEM (or Desktop SEM)

Tabletop Scanning Electron Microscope

Your Research Grade SEM…

The EM-30NEXT is the highest resolution thermionic emission Benchtop Scanning Electron Microscope (SEM) available on the market today providing the best price/performance ratio. With a number of unique capabilities, the EM-30N is the most versatile Benchtop SEM.

Benchtop SEMs have come a long way since their re-introduction in 2005. Gone are the days when these compact SEMs used to be limited in accelerating voltage of 15kV, resolution, selection of apertures, detectors and analytical capabilities. With growing competition in Compact SEM segment, Benchtop SEM prices from Scanning Electron Microscope manufacturers have come down making electron microscopy more affordable and accessible.

Previously the luxury of multiple detector selection, better electron optics and higher analytical accuracy was only available on full size SEMs which not only needed significantly higher investment but was also only accessible to experienced electron microscopists.

The EM-30N breaks those barriers with excellent electron optics design and 30 kV maximum accelerating voltage delivering better than 5 nm resolution and high analytical accuracy. In addition a range of optional detectors can be installed for example simultaneous use of Cathodoluminescence (CL) and EDX. All of this while maintaining incredible ease of use!

» Accelerating Voltage: 1kV to 30kV

» Low vacuum imaging

» High vacuum imaging

» Motorised stage as standard

» Panorama shot imaging

» Cooling stage option

» Unmatched detector selection

» Best in class capabilities

» Best price/performance ratio

» Resolution: < 5 nm

» Magnification: 150,000 x

» 4 Aperture sizes for best EDX and imaging

» Dual display / Signal mixing

» Mini Map for fine navigation

» Coloured camera navigation

» Motorised tilt with crash protection

» New 4 sample BF, DF STEM option!

» Tungsten and CeB₆ filament options!

EM-30Plus benchtop SEM resolution — EM-30N SEM resolution

Solar cell under EM-30Plus benchtop SEM — Solar cell

Ceramic at x100k magnification under EM-30Plus benchtop SEM — Ceramic at 100,000x magnification

Polymer spheres under EM-30Plus benchtop SEM — Polymer spheres

Carbon Nanotubes CNT under EM-30Plus benchtop SEM — Carbon Nanotubes (CNT)

Sputter Coater

Automatic sputter coater for benchtop Scanning Electron Microscope The SPT-20 is an easy to use digital Sputter Coater used for Benchtop or Tabletop SEM specimen coating. It has a touch screen controller and delivers stable coatings using the sputtering current feedback function. Automatic operation eliminates cumbersome process of turning the knobs and adjusting settings to a sweet spot in order to get the sputtering started.

Multiple target options are available to suit a variety of Compact Scanning Electron Microscopy applications.

» Simple operation » Compact rotary pump
» Coloured touch screen » Suitable for various metal targets
» Sputtering current feedback (Au, Pt, Pd, Cr, Pt-Pd, Cu, Ni)

Click here for more sample preparation tools.

Tabletop Plasma Decontaminator

Plasma Cleaner for Scanning Electron Microscope

The only TEM / SEM sample plasma decontaminator with integrated immersion mode cleaning (samples placed in plasma) and downstream mode cleaning (samples placed outside plasma). In addition, this system is equipped with unique pulsed mode operation that can generate extremely short plasma pulses to reduce the plasma intensity for delicate samples.

Click here for more information on our Tabletop Plasma Decontaminators.

Remote Plasma Decontaminator

Our remote plasma decontaminators were designed on the principles of inductively coupled plasma (ICP) discharge technology developed at the Lawrence Berkeley National Laboratory.

Our remote plasma decontaminators are ideal to remove hydrocarbon contamination from chambers of Scanning Electron Microscope (SEM), Focussed Ion Beam (FIB), Transmission Electron Microscope (TEM), X-ray Photoelectron Spectroscope (XPS), Secondary Ion Mass Spectrometer (SIMS), Sensitive High Resolution Ion Micro Probe (SHRIMP), Electron Beam Review system (EBR), Electron Beam Inspection system (EBI), Critical Dimension Scanning Electron Microscope (CD-SEM), Electron Beam Lithography system (EBL), EUV Lithography (EUVL) and EUV mask inspectors and other vacuum-based analytical instruments.

Key Benefits:

» No need to vent the chamber to air

» No need to slow down or turn off TMP

» Unique plasma strength sensor monitors plasma status in real-time. Users are not blind to plasma status anymore!

» Automatic electronic gas flow control. No need to manually adjust needle valve.

» Recipes and cleaning schedules

Remote Plasma Decontaminator on JEOL 7800F FESEM, Zeiss FESEM, FEI Helios FIB-SEM and Tescan LYRA FIB-SEM:

Plasma decontaminator on JEOL 7800F FESEM Scanning Electron Microscope Plasma decontaminator on Zeiss Auriga Merlin FESEM Scanning Electron Microscope

Plasma decontaminator on FEI Helios FIB-SEM Focused Ion Beam Scanning Electron Microscope

Plasma decontaminator on Tescan LYRA FIB-SEM Focused Ion Beam Scanning Electron Microscope

Click here for more information on our Remote Plasma Decontaminators.

Ultimate Active Base for FIB, SEM & TEM

Scanning Electron Microscope SEM Base for Vibration issues DVIA-MB series has been specifically designed for Focussed Ion Beam, Scanning Electron Microscopes and Transmission Electron Microscopes. DVIA-MB series fits all commercial electron microscopes and is the ultimate active vibration control base platform to assist the electron microscopes with obtaining high resolution images.

Click here for more information on Vibration Control Solutions

Scanning Electron Microscope gold on carbon image with active control ON — Active control ON

Scanning Electron Microscope gold on carbon image with active control OFF — Active control OFF

FEI Talos 200S High Resolution Transmission Electron Microscope — FEI Talos 200S TEM on DVIA TEM Base

DVIA SEM Base for Scanning Electron Microscopes — FEI Versa 3D FIB-SEM on DVIA SEM Base

FEI Field Emission Scanning Electron Microscope on DVIA — FEI FESEM on DVIA SEM Base

Zeiss Supra Field Emission Scanning Electron Microscope on DVIA SEM Base — Zeiss Supra FESEM on DVIA SEM Base

Zeiss Evo Scanning Electron Microscope on SEM Base — Zeiss EVO SEM on DVIA SEM Base

Clean Room Foundation Integrated Systems

Foundation vibration control for electron microscopy and electron beam lithography

Transmission and Scanning Electron Microscope Vibration control integrated in the floor Vibration control floor for Focused Ion Beam and Scanning Electron Microscopes