Description
ETALON is a new series of excellent composite AFM probes.
In terms of quality-to-price ratio, it has no analogues in the world market.
High Accuracy High Resonance frequency noncontact AFM probes HA_HR series with stable and wear-resistant long lifetime W2C+ conductive coating.
The main advantages of W2C+ coated probes are:
- Hard coating which stays stable at applied high voltages and flowing currents at the contact point ‘tip-sample’ which cannot be received with standard metal coated probes;
- High conductivity (close to metal conductivity);
- Typical curvature radius less than 35nm;
- W2C+ was modified by volume doping with anticorrosion elements thus providing long-term performance in high humidity conditions.
Experiments, carried out by NT-MDT Spectrum Instruments in december 2015, approved great stability of W2C+ coated probes under high voltage, current and tip-sample pressure. AFM cantilevers showed to be able measure current of several mkA during the whole scan without any degradation. The same excellent performance continued after 100 I-V curves by the range +/- 10V.
Specification of HA_HR/W2C probe series:
| Material | Polysilicon lever, monocrystal silicon tip |
| Chip size | 3.6 x 1.6 x 0.4 mm |
| Reflective side Tip side | Au (20-30 nm) W2C (20-30 nm) |
| Cantilever number | 2 rectangular |
| Tip shape | Octahedral at the base, conic on the last 200 nm |
| Tip cone angle φ | 30 degrees on the last 200 nm |
| Full tip height | ≥10 µm |
| Pedestal/tip ratio | 1:1 |
| Tip curvature radius | less than 35 nm |
| Cantilever type | A | B | Typical dispersion |
| Length, L (µm) | 93 | 123 | ± 2 |
| Width, W (µm) | 34 | 34 | ± 3 |
| Thickness, H (µm) | 3 | 3 | ± 0.15 |
| Force Constant (N/m) | 34 | 17 | ±20% |
| Resonant frequency (kHz) | 380 | 230 | ± 10% |
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