Description
Test grating TGG1 is intended for:
- SPM calibration in X or Y axis;
- detection of lateral and vertical scanner nonlinearity;
- detection of angular distortion;
- tip characterization.
| Grating description | |
| Structure: | the grating is formed on Si wafer top surface |
| Pattern types: | 1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes |
| Edge angle: | 70 degrees |
| Edge radius: | ≤10nm |
| Period: | 3±0,05µm |
| Chip size: | 5x5x0,5mm |
| Effective area: | central square 3x3mm |
Reviews
There are no reviews yet.