Description
Test grating TGX1 is intended for:
-  lateral calibration of SPM scanners;
- detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
- determination of the tip aspect ratio.
| Grating description | |
| Structure | the grating is formed on Si wafer top surface |
| Pattern types | chessboard-like array of square pillars with sharp undercut edges |
| Period | 3±0,05µm |
| Edge curvature radius | less than 10nm |
| Chip size | 5x5x0,5mm |
| Effective area | central square 3x3mm |
| Height | 0,6µm* |
* – the dimensions marked * are given for information only.
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