Description
Test grating TGT1 is intended for:
– for 3-D visualization of the scanning tip;
– determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
| Grating description | |
| Structure: | the grating is formed on Si wafer top surface |
| Pattern types: | array of sharp tips |
| Tip angle: | 50±10 degrees (on the very tip end) |
| Tip curvature radius: | ≤10nm |
| Period: | 3±0,05µm |
| Diagonal period: | 2,12µm |
| Chip size: | 5x5x0,5mm |
| Effective area: | central square 2x2mm |
| Height, h: | 0,3-0,5µm |
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