TGT1

A$ 554

Test grating TGT1 is intended for for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control

SKU: TG2 Category:

Description

Test grating TGT1 is intended for:
– for 3-D visualization of the scanning tip;
– determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.

Grating description
Structure:the grating is formed on Si wafer top surface
Pattern types:array of sharp tips
Tip angle:50±10 degrees (on the very tip end)
Tip curvature radius:≤10nm
Period:3±0,05µm
Diagonal period:2,12µm
Chip size:5x5x0,5mm
Effective area:central square 2x2mm
Height, h:0,3-0,5µm

Additional information

Weight0.1 kg
Dimensions8 × 5 × 0.8 cm

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