A$ 533

Grating set for Z-axis SPM calibration with four different height range – 20nm, 110nm, 520nm, 1400nm

SKU: CG12 Category:


Grating Set TGS1F:
Calibration grating set TGS1F is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 4 gratings TGZ1, TGZ2, TGZ3, TGZ4 with different step heights.

Grating Description:

Structure:– Si wafer
– the grating is formed on the layer of SiO2
Pattern types:1- Dimensional (in Z-axis direction)
Step height:TGZ1 – 20,0±1.5 nm*
TGZ2 – 110±2 nm*
TGZ3 – 520±4 nm*
TGZ4 – 1400±10 nm*
Period:3±0,1 µm
Chip size:5x5x0.5 mm
Effective area:central square 3×3 mm


* – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm).

Additional information

Weight0.1 kg
Dimensions8 × 5 × 0.8 cm


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